The Cascade Microtech 12000-series probe systems allow you to access the full measurement range of your test instrumentation. Noise, leakage, stray capacitance and measurement settling times have been greatly reduced. Whatever the application: DC or RF device characterization, wafer-level reliability, e-test, modeling, or yield enhancement, the 12000-series probe stations assure best-in-the-world measurements.
EQUIPMENT CONFIGURATION & SPECIFICATIONS
Probe Station: Cascade Summit 12000-series semi-automatic wafer probe station with MicroChamber(TM)
Wafer Chuck: 8-inch/200mm RF/Microwave wafer chuck (Ni)
System Controller: 19-inch rack-mount computer; Windows XP Professional(TM) operating system and Nucleus(TM) 2.7 prober control software.
Microscope: Mitutotyo FS50 compound microscope: includes 10X eyepieces and MPlan APO 20X objective len. Additional microscope lenses are sold separately.
Large Area Bridge Mount:
6-inch X axis travel (+/- 3-inch from center of travel); 8-inch Y axis
travel (+/- 4-inch from center of travel); 3-inch linear manual Z-lift
OPTIONAL ACCESSORIES (sold separately, please inquire about availability)
- Probe Positioners: We have a limited supply of RF and DC probe positioners in stock, please call for details.
- Additional Microscope Objective Lenses: Please inquire about additional objective lens magnifications in stock
- Vibration Isolation Table: Vib-Iso table as shown in photos is an optional accessory that is sold separately and subject to availability at the time of order. We have several different models in stock, please inquire.
