Description
The Cascade Microtech 12000-series probe systems allow you to access the full measurement range of your test instrumentation. Noise, leakage, stray capacitance and measurement settling times have been greatly reduced. Whatever the application: DC or RF device characterization, wafer-level reliability, e-test, modeling, or yield enhancement, the 12000-series probe stations assure best-in-the-world measurements.
EQUIPMENT CONFIGURATION & SPECIFICATIONS
Probe Station: Cascade Summit 12000-series semi-automatic, thermal wafer prober with MicroChamber(TM), FemtoGuard(TM), and AttoGuard(TM) shielding
Thermal Wafer Chuck: 8-inch/200mm Temptronic thermal, triaxial wafer chuck (Ni)
Thermal Controller: Temptronic TPO3000-2300-1; 115volts/60Hz/1Ph/20Amps
System Controller: 19-inch rack-mount computer; Windows(TM) XP operating system and Nucleus(TM) 2.7 prober control software.
Microscope: AZoom-2 microscope with LampLink-2 illuminator/controller.
High-Stability Bridge Mount: X-Y travel = 25.4 x 25.4mm (1 x1-inch), Lift repeatability = 1u (0.04mil) typical, Tilt-back range = 2 to 3-inch (5.08-7.62cm), Weight supported = 70lb (max.)
Triaxial & Vacuum Connection Panels: 14x triaxial-to-triaxial connectors, 1x shorting link (Cascade p/n 116-643), vacuum connection panel with 10 vacuum ports (5 right, 5 left)
OPTIONAL ACCESSORIES (sold separately, please inquire about availability)