The Cascade Microtech M150 platform is a high-performance probe station that allows for precision electrical measurements, for high-frequency RF or DC testing. The system can accommodate pieces of wafers and full wafers up to 150 mm wafers, which are held in place by a vacuum chuck. The Leica S6D stereo zoom microscope, with LED illuminator, and CCD camera allows for precise placement of the manipulator test probes using the on screen display or microscope eye piece viewing. This system is configured with the probe card holder assembly for use with industry standard 5.5 inch probe cards.