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Glen R3A Plasma Cleaner
Glen R3A Plasma Cleaner


 
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Product Code: 10047
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Description
 
The Glen R3A Plasma Cleaning System is PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. This 500 watt plasma cleaner has two 14 x 14-inch electrode sets (capable of up to 8 sample trays) which can be quickly configured to provide any of these three plasma modes: Active Plasma for routine cleaning of sample surfaces; RIE Plasma for aggressive cleaning of non ESD sensitive samples; and Downstream, Electron-Free Plasma for cleaning sensitive electronic components normally associated with the semiconductor industry. The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence with two computer selected plasma gas inputs and a connection for a backfill gas (typically nitrogen). The Glen R3A has RS 232 interface as standard.

System Power Source: Advanced Energy PE-1000 AC Plasma Power Source; 1KW @ 13.56MHz

Electrodes: Qty-2 14 x 14-inch electrode sets; capable of up to 8 sample trays

3 Plasma Modes: ACTIVE PLASMA for routine cleaning of sample surfaces; RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; and DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components

Gas Inputs: Computer-controlled; 2 process gases, 1 purge gas

Computer Interface: RS 232 interface

Vintage: 2001

Power Requirements: 110Volt / 60Hz / 1Phase

Full Load Current Rating: 13 Amp

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